Dynamic behavior of T-beam resonator with repulsive actuation

Electrostatic MEMS transducer driven by repulsive force is an attractive possibility and has advantages of avoiding the pull-in instability, tuning natural frequency, achieving high sensitivity applying enough voltages. In this work, a “T”-shaped beam, which formed attaching secondary beam perpendicular to primary cantilever at tip, introduced its nonlinear dynamics analyzed. A reduced-order model derived from mode shapes electromechanical coupling effects respectively. Generalized forms forced Mathieu equation motion are derived, then, dynamic behaviors investigated through theory multiple scales. The resonant responses, including both principal parametric resonances, reveal softening behavior originating quadratic cubic nonlinearities in governing equation. T-beam compared with traditional structure. resonance under demonstrates that several over cantilever: Lower frequency but higher responses can improve signal-to-noise ratio; attached micropaddle, larger surface for absorption targeted analytes mass sensing. We conclude electrostatic resonator potentially appropriate new generations sensors actuators.